| Subsidiary | Country |
| Active Control Experts Inc | United States |
| Asml Shanghai Electrical Equipment Co Ltd | China |
| Asml Shanghai Lithography Facilities Science & Technology | China |
| Asml Austin | United States |
| Asml Belgium Bv | Belgium |
| Asml Belgium Finance Gcv | Belgium |
| Asml Equipment Malaysia Sdn Bhd | Malaysia |
| Asml France Sarl | France |
| Asml Germany Gmbh | Germany |
| Asml Global Inc | United States |
| Asml Holding Nv | Netherlands |
| Asml Hong Kong Logistic Services Ltd | China |
| Asml Hong Kong Ltd | China |
| Asml Hong Kong Ltd | South Korea |
| Asml Ireland Ltd | Ireland |
| Asml Israel 2001 Ltd | Israel |
| Asml Italy Srl | Italy |
| Asml Japan Co Ltd | Japan |
| Asml Korea Co Ltd | South Korea |
| Asml Masktools Bv | Netherlands |
| Asml Masktools Inc | United States |
| Asml Netherlands Bv | Netherlands |
| Asml Participations Germany Gmbh | Germany |
| Asml Singapore Pte Ltd | Singapore |
| Asml Systems Bv | Netherlands |
| Asml Taiwan Ltd | China |
| Asml Technology Taiwan Ltd | China |
| Asml Tianjin Co Ltd | China |
| Asml Trading Bv | Netherlands |
| Asml Us Llc | United States |
| Asml Us Inc | United States |
| Asml Verwaltungs Gmbh | Germany |
| Asml Vianen Bv | Netherlands |
| Berliner Glas Herbert Kubatz Gmbh & Co Projekt Kg | Germany |
| Berliner Glas Kgaa Herbert Kubatz Gmbh & Co | Germany |
| Berliner Glas Wuhan Trading Co Ltd | China |
| Brion Technologies Shenzhen Co Ltd | China |
| Brion Technologies Inc | United States |
| Cymer Bv | Netherlands |
| Cymer Japan Inc | Japan |
| Cymer Korea Return Aggregate | South Korea |
| Cymer Korea Inc | South Korea |
| Cymer Llc | United States |
| Cymer Semiconductor Equipment Shanghai Co Ltd | China |
| Cymer Singapore Pte Ltd | Singapore |
| Cymer Singapore Return Aggregate | Singapore |
| Cymer Southeast Asia Ltd | China |
| Cymer Inc | United States |
| Ediag Solutions Co Ltd | South Korea |
| Herbert Kubatz Glasindustrie Gmbh | Germany |
| Hermes Microvision Shanghai Co Ltd | China |
| Hermes Microvision Japan Inc | Japan |
| Hermes Microvision Korea Inc | South Korea |
| Hermes Microvision Inc | China |
| Hermes Microvision Inc | United States |
| Mapper Lithography Bv | Netherlands |
| Mapper Lithography Holding Bv | Netherlands |
| Masktools | United States |
| Semiconductor Equipment Group | United States |
| Silicon Valley Group Inc | United States |
| Svg Lithography Systems Inc | United States |
| Swissoptic Wuhan Co Ltd | China |
| Tcz Pte Ltd | Singapore |
| Wijdeven Motion Bv | Netherlands |
ASML Holding Subsidiaries
Updated on January 25, 2023