Nanometrics has a total of 289 patents globally, out of which 152 have been granted. Of these 289 patents, more than 16% patents are active. United States of America is where Nanometrics has filed the maximum number of patents, followed by Europe (EPO) and Taiwan. Parallelly, United States of America seems to be the main focused R&D centre and also is the origin country of Nanometrics.
Nanometrics founded in 1975, Nanometrics was a provider of advanced metrology and inspection systems used in semiconductor fabrication to measure critical dimensions, thin films, and device structures. Its high-performance process control solutions supported semiconductor manufacturing and it was later acquired by Onto Innovation.
Do read about some of the most popular patents of Nanometrics which have been covered by us in this article and also you can find Nanometrics patents information, the worldwide patent filing activity and its patent filing trend over the years, and many other stats over Nanometrics patent portfolio.
How many patents does Nanometrics have?
Nanometrics has a total of 289 patents globally. These patents belong to 106 unique patent families. Out of 289 patents, 48 patents are active.
How Many Patents did Nanometrics File Every Year?

Are you wondering why there is a drop in patent filing for the last two years? It is because a patent application can take up to 18 months to get published. Certainly, it doesn’t suggest a decrease in the patent filing.
| Year of Patents Filing or Grant | Nanometrics Applications Filed | Nanometrics Patents Granted |
| 2025 | – | 3 |
| 2021 | – | 2 |
| 2020 | – | 10 |
| 2019 | 1 | 16 |
| 2018 | 3 | 12 |
| 2017 | 1 | 1 |
| 2016 | 12 | 7 |
| 2015 | 8 | 8 |
| 2014 | 10 | 13 |
| 2013 | 13 | 13 |
How many Nanometrics patents are Alive/Dead?
Worldwide Patents

How Many Patents did Nanometrics File in Different Countries?

Countries in which Nanometrics Filed Patents
| Country | Patents |
| United States of America | 58 |
| Europe (EPO) | 42 |
| Taiwan | 32 |
| Germany | 18 |
| Austria | 15 |
| Korea (South) | 12 |
| Japan | 12 |
| China | 11 |
| Canada | 9 |
| United Kingdom | 7 |
| Italy | 4 |
| Switzerland | 4 |
| France | 3 |
| Singapore | 3 |
| Hungary | 2 |
| Israel | 1 |
| Hong Kong (S.A.R.) | 1 |
Where are Research Centres of Nanometrics Patents Located?

10 Best Nanometrics Patents
US7053991B2 is the most popular patent in the Nanometrics portfolio. It has received 89 citations so far from companies like Jordan Valley Semiconductors and Digilens.
Below is the list of 10 most cited patents of Nanometrics:
| Publication Number | Citation Count |
| US7053991B2 | 89 |
| US7230705B1 | 80 |
| US7113276B1 | 73 |
| US20060117293A1 | 61 |
| US20090296075A1 | 54 |
| US20060273263A1 | 54 |
| US20060244969A1 | 45 |
| US7061613B1 | 39 |
| US7295314B1 | 38 |
| US7236244B1 | 38 |
What Percentage of Nanometrics US Patent Applications were Granted?
Nanometrics (Excluding its subsidiaries) has filed 222 patent applications at USPTO so far (Excluding Design and PCT applications). Out of these 193 have been granted leading to a grant rate of 87.73%.
Below are the key stats of Nanometrics patent prosecution at the USPTO.

Which Law Firms are managing US Patents for Nanometrics?
| Law Firm | Total Applications | Success Rate |
| Silicon Valley Patent Group Llp | 88 | 75.00% |
| Paradice And Li Llp | 73 | 98.61% |
| Peacock Law Pc | 8 | 87.50% |
| Linval B Castle | 6 | 100.00% |
| Perkins Coie Llp | 4 | 75.00% |
| Foley & Lardner Llp | 3 | 100.00% |
| G E Ehrlich 1995 Ltd | 3 | 100.00% |
| Michael J Halbert | 3 | 33.33% |
| Joseph E Gortych | 2 | 100.00% |
| Polsinelli Pc | 2 | 100.00% |
What are Nanometrics key innovation segments?
What Technologies are Covered by Nanometrics?

The chart below distributes patents filed by Nanometrics in different countries on the basis of the technology protected in patents. It also represents the markets where Nanometrics thinks it’s important to protect particular technological inventions.

R&D Focus: How has Nanometrics search focus changed over the years?

EXCLUSIVE INSIGHTS COMING SOON!
Interested in knowing about the areas of innovation that are being protected by Nanometrics?