Nanometrics Patents – Insights & Stats (Updated 2026)

Nanometrics has a total of 289 patents globally, out of which 152 have been granted. Of these 289 patents, more than 16% patents are active. United States of America is where Nanometrics has filed the maximum number of patents, followed by Europe (EPO) and Taiwan. Parallelly, United States of America seems to be the main focused R&D centre and also is the origin country of Nanometrics.

Nanometrics founded in 1975, Nanometrics was a provider of advanced metrology and inspection systems used in semiconductor fabrication to measure critical dimensions, thin films, and device structures. Its high-performance process control solutions supported semiconductor manufacturing and it was later acquired by Onto Innovation.

Do read about some of the most popular patents of Nanometrics which have been covered by us in this article and also you can find Nanometrics patents information, the worldwide patent filing activity and its patent filing trend over the years, and many other stats over Nanometrics patent portfolio.

How many patents does Nanometrics have?

Nanometrics has a total of 289 patents globally. These patents belong to 106 unique patent families. Out of 289 patents, 48 patents are active.

How Many Patents did Nanometrics File Every Year?

Nanometrics Patent Filing Trend

Are you wondering why there is a drop in patent filing for the last two years? It is because a patent application can take up to 18 months to get published. Certainly, it doesn’t suggest a decrease in the patent filing.

Year of Patents Filing or GrantNanometrics Applications FiledNanometrics Patents Granted
20253
20212
202010
2019116
2018312
201711
2016127
201588
20141013
20131313

How many Nanometrics patents are Alive/Dead?

Worldwide Patents

Nanometrics Patent Portfolio

How Many Patents did Nanometrics File in Different Countries?

Nanometrics Worldwide Patent Filing Trend

Countries in which Nanometrics Filed Patents

CountryPatents
United States of America58
Europe (EPO)42
Taiwan32
Germany18
Austria15
Korea (South)12
Japan12
China11
Canada9
United Kingdom7
Italy4
Switzerland4
France3
Singapore3
Hungary2
Israel1
Hong Kong (S.A.R.)1

Where are Research Centres of Nanometrics Patents Located?

R&D Centers of Nanometrics

10 Best Nanometrics Patents

US7053991B2 is the most popular patent in the Nanometrics portfolio. It has received 89 citations so far from companies like Jordan Valley Semiconductors and Digilens.

Below is the list of 10 most cited patents of Nanometrics:

Publication NumberCitation Count
US7053991B289
US7230705B180
US7113276B173
US20060117293A161
US20090296075A154
US20060273263A154
US20060244969A145
US7061613B139
US7295314B138
US7236244B138

What Percentage of Nanometrics US Patent Applications were Granted?

Nanometrics (Excluding its subsidiaries) has filed 222 patent applications at USPTO so far (Excluding Design and PCT applications). Out of these 193 have been granted leading to a grant rate of 87.73%.

Below are the key stats of Nanometrics patent prosecution at the USPTO.

EA Stats

Which Law Firms are managing US Patents for Nanometrics?

Law FirmTotal ApplicationsSuccess Rate
Silicon Valley Patent Group Llp8875.00%
Paradice And Li Llp7398.61%
Peacock Law Pc887.50%
Linval B Castle6100.00%
Perkins Coie Llp475.00%
Foley & Lardner Llp3100.00%
G E Ehrlich 1995 Ltd3100.00%
Michael J Halbert333.33%
Joseph E Gortych2100.00%
Polsinelli Pc2100.00%

What are Nanometrics key innovation segments?

What Technologies are Covered by Nanometrics?

The chart below distributes patents filed by Nanometrics in different countries on the basis of the technology protected in patents. It also represents the markets where Nanometrics thinks it’s important to protect particular technological inventions.

R&D Focus: How has Nanometrics search focus changed over the years?

EXCLUSIVE INSIGHTS COMING SOON!

Interested in knowing about the areas of innovation that are being protected by Nanometrics?

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