Onto Innovation has a total of 1292 patents globally, out of which 759 have been granted. Of these 1292 patents, more than 43% patents are active. United States of America is where Onto Innovation has filed the maximum number of patents, followed by Taiwan and South Korea. Parallelly, United States of America seems to be the main focused R&D centre and also is the origin country of Onto Innovation.
Onto Innovation founded in 2019 through the merger of Nanometrics and Rudolph Technologies, Onto Innovation Inc. develops advanced metrology, inspection, lithography, and data analysis systems for microelectronics manufacturing. Its solutions support semiconductor device production across global markets, enabling high-performance process control and yield optimization.
Do read about some of the most popular patents of Onto Innovation which have been covered by us in this article and also you can find Onto Innovation patents information, the worldwide patent filing activity and its patent filing trend over the years, and many other stats over Onto Innovation patent portfolio.
How many patents does Onto Innovation have?
Onto Innovation has a total of 1292 patents globally. These patents belong to 384 unique patent families. Out of 1292 patents, 574 patents are active.
How Many Patents did Onto Innovation File Every Year?

Are you wondering why there is a drop in patent filing for the last two years? It is because a patent application can take up to 18 months to get published. Certainly, it doesn’t suggest a decrease in the patent filing.
| Year of Patents Filing or Grant | Onto Innovation Applications Filed | Onto Innovation Patents Granted |
| 2026 | 1 | 23 |
| 2025 | 27 | 43 |
| 2024 | 56 | 32 |
| 2023 | 102 | 23 |
| 2022 | 84 | 23 |
| 2021 | 33 | 22 |
| 2020 | 28 | 37 |
| 2019 | 15 | 40 |
| 2018 | 64 | 39 |
| 2017 | 21 | 44 |
How many Onto Innovation patents are Alive/Dead?
Worldwide Patents

How Many Patents did Onto Innovation File in Different Countries?

Countries in which Onto Innovation Filed Patents
| Country | Patents |
| United States of America | 452 |
| Taiwan | 181 |
| Korea (South) | 115 |
| Europe (EPO) | 79 |
| Japan | 61 |
| China | 41 |
| Germany | 41 |
| Singapore | 34 |
| Austria | 25 |
| Canada | 11 |
| Israel | 8 |
| United Kingdom | 8 |
| Italy | 5 |
| Australia | 5 |
| France | 4 |
| India | 4 |
| Switzerland | 4 |
| Viet Nam | 3 |
| Netherlands | 3 |
| Malaysia | 2 |
| Portugal | 2 |
| Hungary | 2 |
| Hong Kong (S.A.R.) | 1 |
Where are Research Centres of Onto Innovation Patents Located?

10 Best Onto Innovation Patents
US7301623B1 is the most popular patent in the Onto Innovation portfolio. It has received 409 citations so far from companies like ASM IP Holdings and ERS Electronic.
Below is the list of 10 most cited patents of Onto Innovation:
| Publication Number | Citation Count |
| US7301623B1 | 409 |
| US6982793B1 | 236 |
| US7061615B1 | 229 |
| US6992764B1 | 119 |
| US7469164B2 | 99 |
| US7053991B2 | 89 |
| US7477401B2 | 86 |
| US7046361B1 | 82 |
| US7230705B1 | 80 |
| US7113276B1 | 73 |
What Percentage of Onto Innovation US Patent Applications were Granted?
Onto Innovation (Excluding its subsidiaries) has filed 335 patent applications at USPTO so far (Excluding Design and PCT applications). Out of these 292 have been granted leading to a grant rate of 97.99%.
Below are the key stats of Onto Innovation patent prosecution at the USPTO.

Which Law Firms are managing US Patents for Onto Innovation?
| Law Firm | Total Applications | Success Rate |
| Paradice And Li Llp | 104 | 98.84% |
| Dicke Billig & Czaja Pllc | 86 | 99.19% |
| Silicon Valley Patent Group Llp | 39 | 100.00% |
| Schwegman Lundberg & Woessner Pa | 24 | 75.00% |
| Merchant & Gould Pc | 18 | 100.00% |
| Harrington & Smith | 12 | 100.00% |
| Antonio R Durando | 11 | 100.00% |
| Peacock Law Pc | 5 | 100.00% |
| Larkin Hoffman Daly & Lindgren Ltd | 4 | 100.00% |
| Mccarter & English Llp | 4 | 100.00% |
What are Onto Innovation key innovation segments?
What Technologies are Covered by Onto Innovation?

The chart below distributes patents filed by Onto Innovation in different countries on the basis of the technology protected in patents. It also represents the markets where Onto Innovation thinks it’s important to protect particular technological inventions.

R&D Focus: How has Onto Innovation search focus changed over the years?

EXCLUSIVE INSIGHTS COMING SOON!
Interested in knowing about the areas of innovation that are being protected by Onto Innovation?